Past MEMS and Microelectronics for Motor and Energy Applications Research Projects

Future power electronics, motion control, and communication devices require high efficiency with highly compact and low-cost passive components such as capacitors, inductors, resonators, and relays. At the CEME, we are exploring microtechnology components that will enable future power electronic and electromechanical systems. Micromachining technology has undergone rapid development during the past decade and has been successfully applied to a number of sensors and actuator products. MEMS devices are being applied in radical ways to energy conversion processes.

2006-2007

• GaN-Based MESFET with Enhaced dc Performance Using Nonalloyed Ohmic Contacts and Molecular Beam Epitaxy

2005-2006

• Hybrid Passive Components
• Improved DC Performances of GaN-Based High-Power Field-Effect Transistors Due to Low-Resistance Ohmic Contacts

2004-2005

• Passive Component Design for Intergrated Circuits
• Development of Low Resistance Ohmic Contacts for GaN-based High-Power Field-Effect Transistors