MEMS and Microelectronics for Motor and Energy Applications

Hybrid Passive Components

Daisy Chen with adviser Patrick L. Chapman

Figure 13 A hybrid device shown through a microscope.

Figure 14 A lift-off effect discovered through a scanning electron microscope.

This project involves design and construction of miniature filter components that have both capacitive and inductive (i.e., “hybrid”) behavior. These components are implemented on semiconductor substrates with a minimum footprint. The purpose is to miniaturize power-converter components so that power density is increased while efficiency is maintained. The project focused particularly on depositing and characterizing capacitive materials such as titanium dioxide, which is “sandwiched” between two planar inductors. Figure 13 illustrates a hybrid device shown through a microscope. Figure 14 shows a lift-off effect that was discovered through a scanning electron microscope.

This project was supported by Northrop Grumman Space Technology.

2005-2006 Projects

• Magnetic Equivalent Circuits Applied to Induction Machine Design
• Mathematical Field Computation as an Analytical Tool for Electric Machines
• An Extended Field Reconstruction Technique for Optimization of Permanent Magnet Synchronous Machine Drive Systems
• A Framework for the Analysis and Design of Vector Controllers for Induction Machines
• Hand-Cranked Electric Generator to Poper Remote Off-Grid Villages